Indirect endpoint detection by chemical reaction and chemiluminescence
US6126848A · kind A · utility
464Cited by
20References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 6, 1998 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | May 6, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/175383
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Detection of the endpoint for removal of a target film overlying a stopping film by removing the target film with a process that selectively generates a chemical reaction product (for example ammonia when polishing a wafer with a nitride film in a slurry containing KOH) with one of the stopping film and the target film, converting the chemical reaction product to a separate product, producing excited molecules from the separate product, and monitoring the level of light emitted from the excited molecules as the target film is removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.