Patent · US Expired

Electrode structure of a wiring substrate of semiconductor device having expanded pitch

US6137185A · kind A · utility

18Cited by
8References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 9, 1999
Grant dateOct 24, 2000
Priority date
Expiry dateMar 9, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15311
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An electrode structure as well as the fabrication method thereof is disclosed which may enable successful pad layout conversion of interconnection electrode pads on the periphery of an associated IC chip to a grid array of rows and columns of terminal solder pads arranged occupying the entire area of the opposite surface of the chip while permitting use of a minimized length of wire leads for interconnection therebetween. This is achieved by (i) preparing a flat square IC chip which has an array of regularly spaced peripheral bonding pads the number of which along each of four chip sides is equally defined by a function of 2i(2i-1) where "i" is an integer and which also has external connection pads made of aluminum, (ii) sequentially forming nickel and gold coat films on the chip by electroless plating techniques, (iii) electrically coupling by metal contacts using thermal compression-bonding techniques the peripheral bonding pads to the pad layout conversion substrate for rearrangement of the peripheral bonding pads into the grid array of solder pads, and (iv) filling an adhesion resin between the conversion substrate and the IC chip.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.