Spray coating device
US6139636A · kind A · utility
7Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1998 |
| Grant date | Oct 31, 2000 |
| Priority date | — |
| Expiry date | Nov 12, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/08
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A spray coating device for coating a rotating wafer according to the invention is disclosed. The spray coating device comprises a spray head having a plurality of spray holes which are located on one end thereof with more in number on both sides than on the center of the end for uniformly spraying a chemical liquid on the rotated wafer. Since spray holes are more in number on the both sides than on the center of the end, the rotated wafer can be uniformly spray coated with the chemical liquid even though several spray holes are congested.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.