Protective liner for isolation trench side walls and method
US6143625A · kind A · utility
7Cited by
6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 10, 1998 |
| Grant date | Nov 7, 2000 |
| Priority date | — |
| Expiry date | Sep 10, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/05
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An isolation trench (60) may comprise a trench (20) formed in a semiconductor layer (12). A barrier layer (22) may be formed along the trench (20). A protective liner (50) may be formed over the barrier layer (22). The protective liner (50) may comprise a chemically deposited oxide. A high density layer of insulation material (55) may be formed in the trench (20) over the protective liner (50).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.