Inventor · Saratoga, CA, US

Somnath Nag

29Patents
11h-index
49Co-inventors
75Inventor score

Filing activity: Feb 21, 1997 → Apr 7, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6204200A Process scheme to form controlled airgaps between interconnect lines to reduce capacitance Electricity 264 Expired
US6214719A Method of implementing air-gap technology for low capacitance ILD in the damascene scheme Electricity 66 Expired
US6417092B1 Low dielectric constant etch stop films Electricity 58 Expired
US6313010A Integrated circuit insulator and method Emerging Cross-Sectional Technologies 40 Expired
US5909628A Reducing non-uniformity in a refill layer thickness for a semiconductor device Emerging Cross-Sectional Technologies 36 Expired
US6297125A Air-bridge integration scheme for reducing interconnect delay Electricity 25 Expired
US6127285A Interlevel dielectrics with reduced dielectric constant Electricity 23 Expired
US7713881B2 Process sequence for doped silicon fill of deep trenches Electricity 15 Active
US7786376B2 High efficiency solar cells and manufacturing methods Emerging Cross-Sectional Technologies 15 Active
US6764952B1 Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper Emerging Cross-Sectional Technologies 13 Expired
US7446366B2 Process sequence for doped silicon fill of deep trenches Electricity 13 Active
US8241940B2 Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing Emerging Cross-Sectional Technologies 10 Active
US7109097B2 Process sequence for doped silicon fill of deep trenches Electricity 9 Expired
US6268297A Self-planarizing low-temperature doped-silicate-glass process capable of gap-filling narrow spaces Electricity 8 Expired
US6306725A In-situ liner for isolation trench side walls and method Electricity 8 Expired
US6143625A Protective liner for isolation trench side walls and method Emerging Cross-Sectional Technologies 7 Expired
US8999058B2 High-productivity porous semiconductor manufacturing equipment Emerging Cross-Sectional Technologies 3 Active
US8926803B2 Porous silicon electro-etching system and method Emerging Cross-Sectional Technologies 3 Active
US8883552B2 MWT architecture for thin SI solar cells Emerging Cross-Sectional Technologies 3 Active
US6962883B2 Integrated circuit insulator and method Electricity 2 Expired
US9455360B2 Method of fabricating a metal wrap through solar cell Emerging Cross-Sectional Technologies 0 Active
US9093323B2 Methods for selectively coating three-dimensional features on a substrate Emerging Cross-Sectional Technologies 0 Active
US8445314B2 Method of creating reusable template for detachable thin film substrate Emerging Cross-Sectional Technologies 0 Active
US9401276B2 Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates Emerging Cross-Sectional Technologies 0 Active
US6424040B1 Integration of fluorinated dielectrics in multi-level metallizations Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.