Low actuation voltage microelectromechanical device and method of manufacture
US6143997A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 4, 1999 |
| Grant date | Nov 7, 2000 |
| Priority date | — |
| Expiry date | Jun 4, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49105
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a position of a conductive pad. The switch contains waveguides including the signal line and at least one ground plane. The conductive pad responds to an actuation voltage to electrically connect the signal line and the ground planes when the metal pad is located in a relaxed position. When not located in the relaxed position, the switch breaks the connection to allow signals to flow through the signal line unimpeded. Brackets guide the pad as the pad moves between the relaxed position and a stimulated position due to the actuation voltage, without substantially deforming the conductive pad.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.