Thermal conditioning apparatus
US6150638A · kind A · utility
2Cited by
36References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1999 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Feb 12, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S269/903
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of exhausting vapors emanating from a surface. The method includes enclosing the surface and dividing the enclosed area into a stagnant region adjacent the surface and an interior region in communication with the stagnant region. The method also includes applying a suction to the interior region and admitting air into the interior region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.