Monolithic flow sensor and pressure sensor
US6150681A · kind A · utility
51Cited by
8References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 24, 1998 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Jul 24, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic, integrated circuit sensor combining both a differential pressure sensor and a flow sensor on the same silicon chip. The integrated circuit has a diaphragm with a number of piezo-resistive elements placed on it in the normal manner for a pressure sensor. In addition, a channel is provided between the spaces on the two sides of the diaphragm. The channel has a cross-section which is a fraction of the size of the diaphragm. In one embodiment, the channel is a hole in the diaphragm. In another embodiment, the channel is an etched groove in the frame supporting the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.