Patent assignee · US · COMPANY

SILICON MICROSTRUCTURES, INC.

17Patents
14Active
17Granted
45Portfolio score

Filing activity: Jul 24, 1998 → Dec 20, 2019 · 5 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6150681A Monolithic flow sensor and pressure sensor Physics 51 Expired
US7111518B1 Extremely low cost pressure sensor realized using deep reactive ion etching Physics 31 Expired
US8132465B1 Sensor element placement for package stress compensation Physics 19 Active
US7487681B1 Pressure sensor adjustment using backside mask Physics 12 Active
US6467354B1 Anodically bonded, gas impervious cavity structures fabricated in silicon Physics 12 Expired
US8381596B2 CMOS compatible pressure sensor for low pressures Physics 6 Active
US10641672B2 Manufacturing catheter sensors Physics 5 Active
US8402835B2 Compensation of stress effects on pressure sensor components Emerging Cross-Sectional Technologies 4 Active
US10041851B2 Manufacturing catheter sensors Physics 3 Active
US8866241B2 Pressure sensing device having contacts opposite a membrane Performing Operations; Transporting 3 Active
US8082796B1 Temperature extraction from a pressure sensor Physics 2 Active
US10655989B2 Pressure sensor cap having flow path with dimension variation Physics 1 Active
US8916944B2 Stress-sensitive micro-electromechanical device and use thereof Performing Operations; Transporting 1 Active
US9733139B2 Vertical membranes for pressure sensing applications Physics 0 Active
US8820169B2 Compensation of stress effects on pressure sensor components Emerging Cross-Sectional Technologies 0 Active
US10682498B2 Light shields for catheter sensors Human Necessities 0 Active
US11060929B2 Pressure sensor die attach Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.