Integrated circuit capacitor including anchored plug
US6153901A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 30, 1999 |
| Grant date | Nov 28, 2000 |
| Priority date | — |
| Expiry date | Jul 30, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit capacitor includes a substrate with an interconnection line adjacent the substrate, and a first dielectric layer on the interconnection line. The first dielectric layer includes a trench therein. The metal plug includes a body portion extending upwardly into the trench, and an anchor portion is connected to the body portion and extends into the interconnection line. The anchor portion has an enlarged width portion to anchor the metal plug adjacent lower portions of the first dielectric layer. Because the metal plug is anchored, a depth of the trench can be greater without the metal plug becoming loose and separating from the underlying interconnection line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.