Thermosetting anti-refective coatings
US6156479A · kind A · utility
40Cited by
4References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1999 |
| Grant date | Dec 5, 2000 |
| Priority date | — |
| Expiry date | Mar 22, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain acrylic polymers and copolymers, such as, glycidyl methacrylate reacted with non-polycyclic carboxylic acid dyes and non-polycyclic phenolic dyes, all light absorbing at a wavelength of 193 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.