Method for producing a microelectronic sensor
US6156586A · kind A · utility
2Cited by
9References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1996 |
| Grant date | Dec 5, 2000 |
| Priority date | — |
| Expiry date | Sep 30, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0136
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to a microelectronic integrated sensor, in which a cantilever is formed. To avoid mechanical stress during the production process, the cantilever is disposed freely movably in the sensor. To that end, a support for retaining the cantilever and lateral and upper motion limiters are provided, which prevent the cantilever from slipping off the support. The invention also relates to a method for producing such a sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.