Patent · US Expired

F.sub.2 (157nm) laser employing neon as the buffer gas

US6157662A · kind A · utility

39Cited by

3References

32Claims

0Family size

Assignee

Lambda Physik AG · DE

Inventors

Michael J. Scaggs · The Villages, US
Frank Voss · Berlin, DE

Key dates

Filing date	May 24, 1999
Grant date	Dec 5, 2000
Priority date	—
Expiry date	May 24, 2019

Classification

Technology area (CPC H)Electricity
CPC primaryH01S2302/00
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An F.sub.2 -laser has a discharge chamber containing a laser gas mixture including fluorine as a laser active component and neon as a buffer gas. The gas mixture is surrounded by a resonator and supplied with a pulsed discharge by a pair of electrodes connected to a power supply circuit. The concentration of neon within the gas mixture is preferably higher than any other constituent gas, and is more preferably the only gas accompanying the laser active molecular fluorine. In addition, the gas mixture is preferably maintained at an elevated temperature such as near, yet below, a temperature at which outgassing occurs within the discharge chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.