Substrate transport apparatus with double substrate holders
US6158941A · kind A · utility
467Cited by
31References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1999 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | Jan 12, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20305
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate holders mounted to the movable arm assembly. The substrate holders each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms. Each pair of driven arms is connected to a separate one of the holders for extending and retracting the holders along a radial path relative to a center of the movable arm assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.