Slurry circulation type surface polishing machine
US6159082A · kind A · utility
15Cited by
4References
5Claims
0Family size
Inventors
Key dates
| Filing date | Mar 2, 1999 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | Mar 2, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B57/02
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The bottom of each collection groove for collecting a used abrasive slurry and a rinsing solution is formed like the letter V, an exhaust port is formed at the lowest position of the bottom of the groove, the collection pipe of a slurry supply unit and the collection pipe of a rinsing solution supply unit are connected to the exhaust port, and the collection pipe of the rinsing solution exhaust unit is connected to a suction pump for forcedly discharging the rinsing solution by suction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.