Susceptors
US6160244A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 1999 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | May 19, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A susceptor comprising a planar heat-conductive layer having a heating surface for heating an object to be heated and a rear surface, a supporting member for supporting the planar heat-conductive layer from a side of the rear surface thereof, first and second heat-choking portions provided between the rear surface of the planar heat-conductive layer and the supporting member in this order, said first heat-choking portion being adapted for restricting a heat flow from the rear surface of the planar heat-conductive layer toward the supporting member, and the second heat-choking portion provided between the first heat-choking portion and the supporting member and adapted for restricting a heat flow from the first heat-choking portion to the supporting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.