In-situ binary PCM code indentifier to verify a ROM code id during processing
US6161053A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1998 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | Aug 26, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and means for testing binary code devices, such as ROMs, for correct coding during processing with the Process Control Machine (PCM) for the fabrication process by applying it on the scribe-line built-in binary code devices, and using the testing program to measure the threshold voltage VTN of the code devices and convert the binary signal sensed to a decimal number to identify the ROM code id. After finishing wafer processing and PCM testing, the real ROM code id that has been fabricated can be read from the PCM testing report.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.