Integrated turbo pump and control valve system
US6161576A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1999 |
| Grant date | Dec 19, 2000 |
| Priority date | — |
| Expiry date | Jun 23, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87515
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A gas delivery system comprises a gate valve that can be connected between a turbo pump and a process chamber. The gate valve includes a valve body, a valve seat and a housing constructed to support the valve seat, wherein (a) the valve body is secured within the housing so as to move relative to the valve seat between an opened position and a closed position, and (b) the housing is provided with a gas passageway connected to each of the spaces on opposite sides of the valve body when the valve body is in the closed position. A plurality of valves are mounted to the housing of the gate valve and arranged so as to control the flow of gas through the passageway so that in operation the chamber and turbo pump each can be pumped down through the gas passageway with a second pump connected to one of the valves, and gas can be transferred and the flow controlled through the passageway bypassing the valve body when the valve body is in the closed position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.