Beam expander for ultraviolet lasers
US6163559A · kind A · utility
22Cited by
5References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 22, 1998 |
| Grant date | Dec 19, 2000 |
| Priority date | — |
| Expiry date | Jun 22, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A line narrowed ultraviolet laser having a line narrowing system which includes a grating and an all reflective beam expander. In a preferred embodiment, the beam expander consists of a relatively small circular cylindrical mirror and relatively larger elliptical cylindrical mirror and the grating is an eschelle grating mounted in a Littrow configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.