Antihalation compositions
US6165697A · kind A · utility
34Cited by
25References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 15, 1991 |
| Grant date | Dec 26, 2000 |
| Priority date | — |
| Expiry date | Nov 15, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/38
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.