Resolving power evaluation method and specimen for electron microscope
US6166380A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 1998 |
| Grant date | Dec 26, 2000 |
| Priority date | — |
| Expiry date | May 1, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2823
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.