Patent · US Expired

Process for sequential multi beam laser processing of materials

US6168744A · kind A · utility

6Cited by
3References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 8, 1997
Grant dateJan 2, 2001
Priority date
Expiry dateOct 8, 2017

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K26/364
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A method of processing a substrate by first processing the substrate surface with a laser operating at a first wavelength to both evaporate a portion of the substrate and structurally weaken the substrate surface, and then by processing the substrate surface with a laser operating at a second wavelength to remove the structurally weakened surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.