Device for drying substrates
US6170169A · kind A · utility
2Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 1999 |
| Grant date | Jan 9, 2001 |
| Priority date | — |
| Expiry date | Nov 23, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF26B15/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A device for drying substrate disks by irradiation with ultraviolet light, wherein during the irradiation process a glass plate is resting on the substrate disk, has a lower part on which the substrate disk rests during drying and a liftable and lowerable upper part for lowering a glass plate onto the substrate disk resting on the lower part. The upper part has a glass plate holding device that is lowered below the substrate disk upon lowering of the upper part for placement of the glass plate onto the substrate disk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.