Patent assignee · US · COMPANY

Steag Hamatech AG

28Patents
1Active
28Granted
33Portfolio score

Filing activity: May 19, 1998 → Nov 12, 2005 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6512207B1 Apparatus and method for the treatment of substrates Electricity 31 Expired
US6460730B1 Method and device for dispensing a fluid from a pressure tank Performing Operations; Transporting 22 Expired
US6695017B1 Method and apparatus for filling a pressure tank with a fluid Physics 9 Expired
US6402903B1 Magnetic array for sputtering system Electricity 8 Expired
US6919538B2 Method for thermally treating substrates Electricity 6 Expired
US6254809A System and method for curing a resin disposed between a top and bottom substrate with thermal management Emerging Cross-Sectional Technologies 5 Expired
US6241079A Device for conveying substrates through a substrate processing plant Physics 5 Expired
US6500297B1 Method of forming bonded storage disks with low power light assembly Physics 4 Expired
US6858088B1 Method and apparatus for treating substrates Physics 4 Expired
US6074482A Device for coating disc-shaped information storage media Physics 4 Expired
US6744521B1 Method for determining the thickness of a multi-thin-layer structure Physics 4 Expired
US6355129B1 System and method for thermally manipulating a combination of a top and bottom substrate before a curing operation Emerging Cross-Sectional Technologies 3 Expired
US6413381B1 Horizontal sputtering system Chemistry; Metallurgy 3 Expired
US7842905B2 Method and device for the thermal treatment of substrates Electricity 2 Active
US6170169A Device for drying substrates Mechanical Engineering; Lighting; Heating 2 Expired
US6953514B2 Method and device for assembling substrates Performing Operations; Transporting 2 Expired
US6406598B2 System and method for transporting and sputter coating a substrate in a sputter deposition system Chemistry; Metallurgy 2 Expired
US6612558B1 Apparatus for fixing substrates Physics 1 Expired
US6511616B1 System and method for curing a resin disposed between a top and bottom substrate with thermal management Emerging Cross-Sectional Technologies 1 Expired
US7008502B2 Method and apparatus for joining substrates Emerging Cross-Sectional Technologies 1 Expired
US6352612B1 System for forming bonded storage disks with low power light assembly Physics 0 Expired
US6736590B1 Lifting device for substrates Emerging Cross-Sectional Technologies 0 Expired
US6494511B1 Apparatus and method for handling substrates Performing Operations; Transporting 0 Expired
US7182116B2 Device for joining substrates Performing Operations; Transporting 0 Expired
US6430803B1 Method for maintaining concentricity of a combination of a top and bottom substrate during the assembly of a bonded storage disk Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.