Ablated laser feature shape reproduction control

US6172329A · kind A · utility

Assignees

• Minnesota Mining and Manufacturing Company · US
• Microlas Lasersystem GmbH · DE
• Lambda Physik AG · DE

Inventors

• Curtis L. Shoemaker · Round Rock, US
• Daniel J. Treadwell · Austin, US
• Berthold Burghardt · Oettingen, DE
• Sergei V. Govorkov · Mountain View, US

Key dates

• Filing date: Nov 23, 1998
• Grant date: Jan 9, 2001
• Expiry date: Nov 23, 2018

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K26/066
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

This invention concerns a process useful for increasing the accuracy of the shape of a laser ablated feature formed on a substrate, especially where the substrate is a polymeric article. The process includes irradiating the polymeric article with laser light that has passed through a retardation plate selected from stationary adjustable plates, rotating plates or spinning plates, preferable in multiples of quarter-waves or half-waves. This invention also concerns a laser apparatus useful for making ablated features in a substrate having a radiation source; a mask positioned between the radiation source and a substrate to be irradiated, and a retardation plate which is stationary and adjustable, rotating or spinning plates.