Patent · US Expired

Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device

US6172796A · kind A · utility

60Cited by
12References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 18, 1998
Grant dateJan 9, 2001
Priority date
Expiry dateDec 18, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/0808
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for operating an electro-mechanical grating device comprises the steps of: PA1 providing a beam of light; PA1 applying a first electrostatic actuation force for a certain amount of time thereby generating a first pattern in each group wherein the pattern comprises N different levels thereby diffracting the incident light beam into a first direction; and PA1 applying a second electrostatic actuation force for a certain amount of time thereby generating a second pattern in each group wherein the second pattern comprises N different levels thereby diffracting the incident light beam into a second direction different from the first direction. The electro-mechanical grating device has a plurality of spaced apart deformable ribbon elements disposed parallel to each other in the unactuated state and spanning a channel. The deformable ribbon elements are organized in groups of N elements wherein N is greater than 2. A plurality of standoffs are provided, wherein according to the longitudinal direction of the electro-mechanical grating device at least N-2 standoffs are associated with each group.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.