Patent · US Expired

Methods of forming a barrier layer

US6174823A · kind A · utility

7Cited by
13References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 21, 1997
Grant dateJan 16, 2001
Priority date—
Expiry dateNov 21, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76843
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

This invention relates to methods of forming a barrier layer including depositing a layer of Titanium Nitride and subsequently nitriding the surface of that layer. In some embodiments the Titanium Nitride layer is exposed to Oxygen prior to the nitroding step.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.