Accumulator for slurry sampling
US6176765A · kind A · utility
2Cited by
27References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 1999 |
| Grant date | Jan 23, 2001 |
| Priority date | — |
| Expiry date | Feb 16, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B57/02
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A fluid collection apparatus having an accumulator for contacting a polishing surface of a polishing pad and collecting fluid from the polishing pad, a reservoir for receiving fluid from the accumulator, and a volume maintainer for maintaining a set volume of fluid in the reservoir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.