Grindstone having a vacuum system in a pin chuck stepper
US6176770A · kind A · utility
3Cited by
5References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2000 |
| Grant date | Jan 23, 2001 |
| Priority date | — |
| Expiry date | Jan 31, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70925
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A grindstone having a vacuum system is applied to a pin chuck stepper. The vacuum system has a vacuum tube attached on the edge of the grindstone. When the grindstone moves on a pin chuck stage on the pin chuck stepper, the vacuum tube vacuums the pin chuck stage to free particles on the pin chuck stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.