Inflatable door seal
US6176934A · kind A · utility
13Cited by
1References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 16, 1999 |
| Grant date | Jan 23, 2001 |
| Priority date | — |
| Expiry date | Sep 16, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16J15/46
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A semiconductor article processor sprays processing chemicals on a semiconductor article or wafer within a chamber. A door with an inflatable resilient seal, seals the chamber closed during processing. A seal support on the door extends radially outwardly into the inflatable seal, to better hold the seal onto the door. Inflation pressures can be increased, and the accumulation of chemical residues around the inflatable seal are decreased. Consequently, the effectiveness and reliability of the inflatable seal is improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.