Patent · US Expired

Probe tip locator

US6178653A · kind A · utility

5Cited by
4References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 20, 1998
Grant dateJan 30, 2001
Priority date
Expiry dateNov 20, 2018

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/851
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A probe tip locator for use in determining the x-axis location and y-axis location of a probe tip of a microscope relative to the locator, the locator comprising a plurality of first reference lines parallel in a first direction, each of the first reference lines representing a predetermined x-axis location of the probe tip; a plurality of sets of parallel encoded bit fields, each one of the sets corresponding to one of the first reference lines; and a plurality of second reference lines parallel in a second direction, each one of the second reference lines intersecting at least one of the first reference lines at an acute angle, such that a scan of a portion of the locator is used to determine the x-axis location and y-axis location of the probe tip relative to the probe tip locator by movement of the probe tip relative to the probe tip locator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.