Slurry pump control system
US6183341A · kind A · utility
19Cited by
11References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 9, 1999 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | Feb 9, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0379
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A CMP slurry pumping system which uses the slurry pump inlet pressure as input to the pump controller, and adjusts pump speed to account for variations in inlet pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.