UV/halogen metals removal process
US6183566A · kind A · utility
6Cited by
16References
23Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 1, 1999 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | Jun 1, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A chlorine based dry-cleaning system appropriate for removing metal contaminants from the surface of substrate is described in which the metal contaminant is chlorinated and reduced to a volatile metal chloride by UV irradiation. The process parameters of chlorine gas partial pressure, temperature, ultraviolet bandwidth, and/or the sequence of exposure of the substrate to the chlorine containing gas and to the ultraviolet radiation are selected so as to effect substantial removal of the metal without excessive substrate roughening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.