Herbert H. Sawin
13Patents
10h-index
22Co-inventors
68Inventor score
Filing activity: Jun 23, 1989 → Jan 6, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5061838A | Toroidal electron cyclotron resonance reactor | Electricity | 324 | Expired |
| US5450205A | Apparatus and method for real-time measurement of thin film layer thickness and changes thereof | Physics | 207 | Expired |
| US5888591A | Chemical vapor deposition of fluorocarbon polymer thin films | Emerging Cross-Sectional Technologies | 160 | Expired |
| US6740247B1 | HF vapor phase wafer cleaning and oxide etching | Electricity | 153 | Expired |
| US6156435A | Chemical vapor deposition of fluorocarbon polymer thin films | Emerging Cross-Sectional Technologies | 140 | Expired |
| US7037846B2 | Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing | Electricity | 85 | Expired |
| US6153115A | Monitor of plasma processes with multivariate statistical analysis of plasma emission spectra | Physics | 66 | Expired |
| US6153269A | Chemical vapor deposition of fluorocarbon polymer thin films | Emerging Cross-Sectional Technologies | 66 | Expired |
| US6761796B2 | Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing | Electricity | 48 | Expired |
| US6083413A | Metals removal process | Electricity | 25 | Expired |
| US5954884A | UV/halogen metals removal process | Electricity | 7 | Expired |
| US6183566A | UV/halogen metals removal process | Electricity | 6 | Expired |
| US6107166A | Vapor phase cleaning of alkali and alkaline earth metals | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.