Semiconductor device manufacturing method, manufacturing apparatus, simulation method and simulator
US6185472A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1996 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | Dec 27, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F30/23
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A semiconductor device manufacturing method capable of proceeding semiconductor device manufacturing processes according to predetermined schedules or while correcting them without testpieces is provided. The method includes the steps of collecting actually observed data during at least one of plural steps, obtaining prediction data in at least one of plural steps by using an ab initio molecular dynamics process simulator or a molecular dynamics simulator, comparing and verifying the prediction data and the actually observed data sequentially at real time, and correcting and processing the plural manufacturing process factors sequentially at real time if a difference in significance is recognized between set values for the plural manufacturing process factors and the plural manufacturing process factors estimated from the actually observed data according to comparison and verification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.