Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device
US6187210A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1998 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | Jun 29, 2018 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/685
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A probe includes an elongated body with a top surface, a bottom surface, a first side wall between the top surface and the bottom surface, and a second side wall between the top surface and the bottom surface. An end is defined by the bottom surface converging into a tip, an isotropically etched portion of the first side wall converging into the tip, and an isotropically etched portion of the second side wall converging into the tip. The elongated body is less than approximately 700 .mu.m wide and less than approximately 200 .mu.m thick. The elongated body may incorporate a fluid channel. The elongated body may be formed of silicon that is not doped with Boron. In such a configuration, integrated circuitry or a micromachined device, such as a heater or pump may also be formed on the device. A number of novel processing techniques are associate with the fabrication of the device. The device may be formed by relying solely on isotropic etching. Alternately, a combination of isotropic and anisotropic etching may be used. Unlike prior art micromachined devices, the disclosed device may be processed at relatively low temperatures below 1100.degree. C. and without using the carcinogen et…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.