Irradiation mask
US6187484A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/066
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser ablation mask, a method of mask production, and an process of workpiece irradiation are provided. In accordance with one embodiment of the present invention, a method of producing a radiation reflective mask is provided comprising the steps of: (i) providing a substrate, wherein the substrate is transparent to radiation of a selected range of wavelengths; (ii) forming a metallic layer over an upper surface of the substrate, wherein the metallic layer is reflective of the selected wavelengths of radiation; (iii) forming at least one pair of dielectric layers over an upper surface of the metallic layer, wherein the pair of dielectric layers are arranged to reflect incident radiation at the selected wavelengths; and (iv) patterning the metallic layer and the pair of dielectric layers to form apertures therein, wherein the apertures render portions of the mask transparent to the selected wavelengths of radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.