Method of forming a semiconductor device for a light valve
US6187605A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 1994 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | Sep 19, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A semiconductor substrate is utilized to integrally form a drive circuit and a pixel array to produce a transparent semiconductor device for a light valve. The semiconductor device for a light valve is constructed of a semiconductor substrate composed of a bulk single crystal silicon having an opaque thick portion and a thin transparent portion. A pixel array is formed in the transparent portion. A drive circuit is formed in a top face of the opaque portion. A transparent support substrate is laminated to the top face of the semiconductor substrate for reinforcement. A bulk portion of the semiconductor substrate is removed from a back face thereof by selective etching to provide the transparent portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.