In-line cell for absorption spectroscopy
US6188475A · kind A · utility
27Cited by
29References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 2, 1999 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | Sep 2, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/151
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.