James McAndrew
26Patents
12h-index
22Co-inventors
81Inventor score
Filing activity: Mar 27, 1992 → Aug 16, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5963336A | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Physics | 52 | Expired |
| US6154284A | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Physics | 33 | Expired |
| US6421127B1 | Method and system for preventing deposition on an optical component in a spectroscopic sensor | Physics | 32 | Expired |
| US5880850A | Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy | Physics | 29 | Expired |
| US5818578A | Polygonal planar multipass cell, system and apparatus including same, and method of use | Physics | 29 | Expired |
| US6188475A | In-line cell for absorption spectroscopy | Physics | 27 | Expired |
| US5991696A | Method for intelligent data acquisition in a measurement system | Physics | 23 | Expired |
| US5261452A | Critical orifice dilution system and method | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5949537A | In-line cell for absorption spectroscopy | Physics | 17 | Expired |
| US6493086B1 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Physics | 15 | Expired |
| US5835230A | Method for calibration of a spectroscopic sensor | Physics | 15 | Expired |
| US6442736B1 | Semiconductor processing system and method for controlling moisture level therein | Physics | 13 | Expired |
| US5742399A | Method for stabilizing the wavelength in a laser spectrometer system | Physics | 8 | Expired |
| US6341521B1 | Process and device for measuring the amount of impurities in a gas sample to be analyzed | Physics | 7 | Expired |
| US6084668A | In-line cell for absorption spectroscopy | Physics | 5 | Expired |
| US5351120A | Spectroscopic cell design | Physics | 4 | Expired |
| US5714678A | Method for rapidly determining an impurity level in a gas source or a gas distribution system | Physics | 4 | Expired |
| US9618203B2 | Method and system for heat recovery from products of combustion and charge heating installation including the same | Emerging Cross-Sectional Technologies | 3 | Active |
| US6885452B2 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Physics | 3 | Expired |
| US6499502B1 | Method and device for filling a distribution line with corrosive gas | Emerging Cross-Sectional Technologies | 3 | Expired |
| US8298965B2 | Volatile precursors for deposition of C-linked SiCOH dielectrics | Electricity | 2 | Active |
| US8932674B2 | Vapor deposition methods of SiCOH low-k films | Electricity | 2 | Active |
| US11280491B2 | Furnace with integrated heat recovery utilizing radiative recuperator for preheating combustion reactants using heat from flue gas | Emerging Cross-Sectional Technologies | 0 | Active |
| US8999734B2 | Cyclic amino compounds for low-k silylation | Electricity | 0 | Active |
| US10465904B2 | Furnace with integrated heat recovery utilizing radiative recuperator for preheating combustion reactants using heat from flue gas | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.