Method of manufacture of composite self-aligned extraction grid and in-plane focusing ring
US6190223A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1998 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Jul 2, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission display having a base plate which has a focus ring structure substantially planar with the extraction grid. The field emission display base plate is fabricated on a substrate having a cathode including an emitter tip formed thereon by depositing a first insulating layer, a first conductive layer over the first insulating layer, etching the first conductive layer, depositing a second insulating layer over the etched first conductive layer, and depositing a second conductive or focus ring layer over the second insulating layer. A second selective etching may be formed to further define the gate and focus ring structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.