High conformality antireflective coating compositions
US6190839A · kind A · utility
33Cited by
21References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 1998 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Jan 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides new light absorbing compositions suitable for use as antireflective coating compositions ("ARCs"), particularly for deep UV applications. The antireflective compositions of the invention in general comprise a resin binder component that contains a high molecular weight polymer, e.g. a polymer having an M.sub.w of at least about 40,000 daltons. ARCs of the invention exhibit exceptional conformality upon application to a substrate surface. For example, ARCs of the invention can coat substantial topography such as vertical and sloping steps with high conformality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.