Manuel DoCanto
13Patents
11h-index
17Co-inventors
61Inventor score
Filing activity: Sep 18, 1996 → Apr 20, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5939236A | Antireflective coating compositions comprising photoacid generators | Emerging Cross-Sectional Technologies | 120 | Expired |
| US6316165A | Planarizing antireflective coating compositions | Emerging Cross-Sectional Technologies | 62 | Expired |
| US6410209B1 | Methods utilizing antireflective coating compositions with exposure under 200 nm | Physics | 61 | Expired |
| US6261743A | Antireflective coating compositions comprising photoacid generators | Emerging Cross-Sectional Technologies | 59 | Expired |
| US6503689B2 | Antireflective composition | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6190839A | High conformality antireflective coating compositions | Physics | 33 | Expired |
| US6653049B2 | High conformality antireflective coating compositions | Physics | 33 | Expired |
| US6602652B2 | Antireflective coating compositions and exposure methods under 200 nm | Physics | 28 | Expired |
| US6855466B2 | Planarizing antireflective coating compositions | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6849373B2 | Antireflective coating compositions comprising photoacid generators | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5876899A | Photoresist compositions | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7026101B2 | Antireflective coating compositions | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7147983B1 | Dyed photoresists and methods and articles of manufacture comprising same | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.