Heating element with a diamond sealing material
US6191390A · kind A · utility
3Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 1999 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | May 14, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A substrate support plate including a heating element for use in a process chamber is described. The heating element includes an outer sheath, a heating filament and a thermally-conductive and electrically insulative sealing material. The sealing material comprises a diamond powder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.