Method for detecting a contact position between an object to be measured and measuring pins
US6191596A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 22, 1998 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | May 22, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method is disclosed for detecting a contact position between an object under measurement and measuring pins. A semiconductor test device issues an instruction to a wafer prober control unit to control raising and down of a stage. When raising the stage in units of a predetermined distance a and detecting that the number of probe pins in contact with a wafer is equal to or greater than a constant value; the semiconductor test device lowers the stage in units of the predetermined distance a. When the number of contacted pins are less than the constant value, the device again raises the stage in units of a predetermined distance b smaller than the predetermined distance a; whereas, when the number of contacted pins is equal to or greater than the constant value, the device treats the position of the stage at that time as a first touch position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.