Apparatus and method for the determination of grain size in thin films
US6191855A · kind A · utility
41Cited by
17References
8Claims
0Family size
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Key dates
| Filing date | Mar 13, 2000 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Mar 13, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/171
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.