Inventor · Barrington, RI, US

Humphrey J. Maris

34Patents
19h-index
8Co-inventors
74Inventor score

Filing activity: May 17, 1985 → May 28, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US5748318A Optical stress generator and detector Physics 235 Expired
US4710030A Optical generator and detector of stress pulses Physics 172 Expired
US5959735A Optical stress generator and detector Physics 119 Expired
US5706094A Ultrafast optical technique for the characterization of altered materials Physics 77 Expired
US5844684A Optical method for determining the mechanical properties of a material Physics 77 Expired
US6008906A Optical method for the characterization of the electrical properties of semiconductors and insulating films Physics 69 Expired
US5748317A Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector Physics 66 Expired
US6211961A Optical method for the characterization of the electrical properties of semiconductors and insulating films Physics 61 Expired
US6175416A Optical stress generator and detector Emerging Cross-Sectional Technologies 53 Expired
US6321601A Optical method for the characterization of laterally-patterned samples in integrated circuits Physics 47 Expired
US6025918A Apparatus and method for measurement of the mechanical properties and electromigration of thin films Physics 45 Expired
US6191855A Apparatus and method for the determination of grain size in thin films Physics 41 Expired
US6208421A Optical stress generator and detector Emerging Cross-Sectional Technologies 41 Expired
US7624640B2 Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations Physics 38 Active
US6208418A Apparatus and method for measurement of the mechanical properties and electromigration of thin films Physics 38 Expired
US6400449B2 Optical stress generator and detector Emerging Cross-Sectional Technologies 34 Expired
US5864393A Optical method for the determination of stress in thin films Physics 33 Expired
US6038026A Apparatus and method for the determination of grain size in thin films Physics 32 Expired
US6271921A Optical stress generator and detector Emerging Cross-Sectional Technologies 23 Expired
US6317216A Optical method for the determination of grain orientation in films Electricity 15 Expired
US8302480B2 Enhanced ultra-high resolution acoustic microscope Physics 13 Active
US6381019B1 Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample Physics 12 Expired
US7339676B2 Optical method and system for the characterization of laterally-patterned samples in integrated circuits Physics 10 Expired
US6563591B2 Optical method for the determination of grain orientation in films Electricity 9 Expired
US6087242A Method to improve commercial bonded SOI material Electricity 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.