Spin-processing apparatus and spin-processing method
US6192903A · kind A · utility
6Cited by
2References
10Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 3, 1999 |
| Grant date | Feb 27, 2001 |
| Priority date | — |
| Expiry date | May 3, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a spin-processing apparatus less likely to produce a mist when an object to be processed is rotated. The apparatus is characterized in that it comprises a cup body having a lower cup and an upper cup mounted relative to the lower cup to be up/down movable, a rotation body retaining the object mounted within the cup body, a step motor rotationally driving the rotation body, an exhaust tube connected to a bottom of the lower cup to allow a gas in the cup body to be exhausted, and a scatter-proof cover provided within the upper cup and mounted above the rotation body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.