SHIBAURA MECHATRONICS CORPORATION
176Patents
147Active
176Granted
57Portfolio score
Filing activity: Dec 4, 1997 → Mar 21, 2024 · 39 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8104385B2 | Brittle workpiece splitting system and brittle workpiece splitting method | Emerging Cross-Sectional Technologies | 56 | Active |
| US6416638B1 | Power supply unit for sputtering device | Electricity | 38 | Expired |
| US7301286B2 | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge | Electricity | 17 | Expired |
| US6189591A | Wafer sheet expanding apparatus and pellet bonding apparatus using thereof | Emerging Cross-Sectional Technologies | 16 | Expired |
| US7075036B2 | Electronic part compression bonding apparatus and method | Performing Operations; Transporting | 15 | Expired |
| US7114245B2 | Component holding head, component mounting apparatus using same, and component mounting method | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6299697A | Method and apparatus for processing substrate | Electricity | 12 | Expired |
| US6851460B2 | Liquid crystal dropping apparatus and method, and liquid crystal display panel producing apparatus | Performing Operations; Transporting | 11 | Expired |
| US7149341B2 | Wafer inspection apparatus | Physics | 11 | Expired |
| US7367601B2 | Substrate transfer apparatus and substrate transfer method | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6337003B1 | Vacuum apparatus and driving mechanism therefor | Chemistry; Metallurgy | 11 | Expired |
| US6113760A | Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus | Electricity | 11 | Expired |
| US8998561B2 | Gripping device, transfer device, processing device, and manufacturing method for electronic device | Emerging Cross-Sectional Technologies | 9 | Active |
| US6230721A | Processing apparatus and method, robot apparatus | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7531070B2 | Sputtering power-supply unit | Electricity | 8 | Active |
| US6363950B2 | Apparatus for processing substrate using process solutions having desired mixing ratios | Electricity | 7 | Expired |
| US6083364A | Magnetron sputtering apparatus for single substrate processing | Electricity | 6 | Expired |
| US6192903A | Spin-processing apparatus and spin-processing method | Emerging Cross-Sectional Technologies | 6 | Expired |
| US9811096B2 | Liquid feeding device and substrate treating device | Performing Operations; Transporting | 6 | Active |
| US7403278B2 | Surface inspection apparatus and surface inspection method | Physics | 6 | Active |
| US8088296B2 | Plasma processing device and plasma processing method | Electricity | 6 | Active |
| US10026760B2 | Substrate processing apparatus and substrate processing method | Electricity | 5 | Active |
| US6377866B2 | Device for engraving and inspecting a semiconductor wafer identification mark | Electricity | 5 | Expired |
| US8454754B2 | Cleaning method and method for manufacturing electronic device | Electricity | 5 | Active |
| US9553003B2 | Substrate processing device and substrate processing method | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.