Apparatus and method for supplying a process solution
US6193783A · kind A · utility
42Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1999 |
| Grant date | Feb 27, 2001 |
| Priority date | — |
| Expiry date | Jun 9, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D19/0063
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A process solution supplying apparatus including a solution source from which a process solution is supplied, a supply pipe having an upstream end and a downstream end and connected at the upstream end to the solution source, a nozzle connected to the downstream end of the supply pipe, a pump provided on the supply pipe, for supplying the process solution from the solution source to the nozzle, an upstream control valve provided on the supply pipe and located between the pump and the solution source, and a deaerating mechanism provided between the pump and the upstream control valve, for removing gases from the process solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.